Wide-Field Magnetic Field and Temperature Imaging Using Nanoscale Quantum Sensors
نویسندگان
چکیده
منابع مشابه
Current Imaging using Magnetic Field Sensors
As process technologies of integrated circuits become more complex and the industry moves toward advanced packaging like flip-chip and stacked die, present tools and techniques are having increasing difficulty in meeting failure analysis needs [1]. With gate sizes approaching 65 nm, “killer defects” may only be a few nanometers in size. In some cases, the defects are nonvisible, i.e. there is n...
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ژورنال
عنوان ژورنال: ACS Applied Materials & Interfaces
سال: 2020
ISSN: 1944-8244,1944-8252
DOI: 10.1021/acsami.0c01545